Nanox opens South Korean fabrication plant

Posted 8 April 2022

Nano-X Imaging announced that it has opened its new semiconductor chip fabrication plant in South Korea. The facility is operational, opened on schedule, and will be the main production site of Nanox micro-electro-mechanical systems (“MEMs”) known as Nanox.SOURCE, a chip that produces the digital X-ray source for the Company’s Nanox.ARC system, a 3D medical imaging system.

Nanox expects to get to scale for production by mid-year 2022. Additionally, Nanox has been building its production line capabilities and establishing an operational assembly line at its Israeli facility to enable the expected ramp up in production and preparation for shipments of the Nanox.ARC system.

The new facility is a highly advanced fabrication plant, dedicated to the production of MEMs. Strategically located next to the world’s largest semiconductor cluster in Yongin, South Korea, the Nanox facility spans 12,000 square meters, including a 1,200-square-meter MEMs clean room.

The facility is designed to perform advanced semiconductor fabrication practices, including 200nm photolithography using a krypton fluoride (KrF) scanner, electrochemical metal etching, chemical vapor deposition (CVD) and physical vapor deposition (PVD) of thin films, dry etching, wet and chemical etching, chip inspection and testing in vacuum, and C-module packaging for X-ray tubes.



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