EO_481

TECH INSIGHT PHOTONIC ICS 33 - ELETTRONICA OGGI 481 - OTTOBRE 2019 Referenze [1] MarketsandMarkets, “Silicon Photonics Market by Product (Transceiver, Switch, Variable Optical Atte- nuator, Cable, Sensor), Application (Data Center, Telecommunications, Military & Defense, Medical and Life Sciences, Sensing), Component, and Geography - Global Forecast to 2023”, Febbraio 2018. https://www.marketsandmarkets.com/Market-Reports/silicon-photonics-116.html [2] R. Cao, J. Ferguson, F. Gays, Y. Drissi, A. Arriordaz e I. O’Connor, “Silicon photonics design rule checking: Application of a programmable modeling engine for non-Manhattan geometry verification” 2014 22a Con- ferenza Internazionale sulla Very Large Scale Integration (VLSI-SoC), Playa del Carmen, 2014, pp. 1-6. doi: 10.1109/VLSI-SoC.2014.7004173 http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7004173&isn umber=70041501] [3] X. Wang et al., “Lithography simulation for the fabrication of silicon photonic devices with deep-ultra- violet lithography,” 9a Conferenza Internazionale sulla Group IV Photonics (GFP), San Diego, CA, 2012, pp. 288-290. doi: 10.1109/GROUP4.2012.6324162 http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6324162&isnumber=6324060 Fig. 9 – Un tipico workflow di LFD